Water‐Resistant Coating on Low Temperature Amorphous Silicon Nitride Films by a Thin Layer of Amorphous Silicon Hydrogen Alloy
- 1 April 1997
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 144 (4) , 1477-1481
- https://doi.org/10.1149/1.1837615
Abstract
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