Fabrication of Thin Film LiCo0.5Ni0.5 O 2 Cathode for Li Rechargeable Microbattery

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Abstract
Thin film cathodes were fabricated by electron beam evaporation and postannealing in oxygen atmosphere. As‐deposited film showed almost amorphous characteristics, but included some crystalline phases. Hexagonal phase of was formed in the films annealed between 500 and 700°C. The crystallinity of the film was improved as the annealing temperature increased to 700°C. Open‐circuit voltage (OCV) curves were measured. Especially, the film annealed at 700°C for 10 min showed a similar OCV curve to that of bulk powder cathode. It can be suggested that thin film is suitable for the cathode of Li rechargeable microbattery.

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