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Issues associated with the use of electroless copper films for submicron multilevel interconnections
Home
Publications
Issues associated with the use of electroless copper films for submicron multilevel interconnections
Issues associated with the use of electroless copper films for submicron multilevel interconnections
MT
M.E. Thomas
M.E. Thomas
SS
S. Sekigahama
S. Sekigahama
SM
S.A. Myers
S.A. Myers
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4 December 2002
conference paper
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/vmic.1990.127889
Abstract
No abstract available
Keywords
ELECTROLESS COPPER
MULTILEVEL INTERCONNECTIONS
ISSUES ASSOCIATED
COPPER FILMS
SUBMICRON MULTILEVEL
Cited
Cited by 2 articles
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