Growth and electrical characteristics of r.f. sputtered aluminum oxide

• 1 April 1969
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 3  (4) , R23-R26
• https://doi.org/10.1016/0040-6090(69)90125-4

Abstract

Keywords

• R.F
• SPUTTERED ALUMINUM
• ELECTRICAL CHARACTERISTICS
• ALUMINUM OXIDE
• GROWTH AND ELECTRICAL