Reactive Sputtering with Sublimated Vapours in a Nichrome Furnace

• 1 January 1972
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 15  (11) , 402-408
• https://doi.org/10.3131/jvsj.15.402

Abstract

Keywords

• REACTIVE SPUTTERING
• NICHROME FURNACE
• SUBLIMATED VAPOURS
• SPUTTERING WITH SUBLIMATED