A new planar microtransformer for use in macro-switching-converters

Abstract
A novel planar microtransformer for use in micro-switching converters of portable equipment is described. This microtransformer, consisting of planar coils and CoZrRe amorphous magnetic layers on a Si substrate, is fabricated by a dry process. It is approximately 0.3 mm thick and 4*4 mm/sup 2/. The coils have relatively high inductance of 50 nH/mm/sup 2/. This microtransformer is used in a primary-controlled forward converter, which operates well at 32 MHz.<>

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