Ohmic contacts to n-type polycrystalline SiC for high-temperature micromechanical applications
- 1 April 1997
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 46 (1-3) , 180-185
- https://doi.org/10.1016/s0921-5107(96)01959-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Diamond Layers on Silicon: Feasibility of Interface Assessment by Infrared and Raman SpectroscopiesPhysica Status Solidi (a), 1996
- Structural and electronic characterization of β-SiC films on Si grown from mono-methylsilane precursorsMaterials Science and Engineering: B, 1995
- The effects of contact size and non-zero metal resistance on the determination of specific contact resistanceSolid-State Electronics, 1982