RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr1-xTix)O3 film and surface micromachining
- 1 January 1998
- journal article
- Published by Springer Nature in Journal of Materials Science: Materials in Electronics
- Vol. 9 (6) , 465-471
- https://doi.org/10.1023/a:1008910326521
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