Micro gears and turbines etched from silicon

This publication has 3 references indexed in Scilit:

• Silicon as a mechanical material
  Proceedings of the IEEE, 1982
• Fabrication of novel three-dimensional microstructures by the anisotropic etching of
  IEEE Transactions on Electron Devices, 1978
• Anisotropic etching of silicon
  IEEE Transactions on Electron Devices, 1978