Ultrahigh vacuum low temperature stage for i n s i t u film deposition and characterization

Abstract
An apparatus which combines a liquid 4He Dewar with an ultrahigh vacuum system used for LEED or AES surface analysis and ultrathin film deposition is described. A linear motion bellows seal allows the substrate for film deposition to be moved out of the radition shields, which makes ion bombardment cleaning possible. A He gas heat exchanger between the substrate holder and He reservoir provides a wide variation of temperatures. In situ measurements of superconducting transition temperatures below 2 K have been made with this apparatus.

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