Noncontact fluorescence measurements for inspection and imprint depth control in nanoimprint lithography
- 16 August 2002
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 4764, 218-224
- https://doi.org/10.1117/12.479357
Abstract
Fluorescence microscopy was introduced as a low cost contamination-free method for rapid quality assessment of an imprint process. An optical microscope equipped with a UV- light source was used and the polymer for imprint was labeled with a fluorescent dye, based on perylene- tetracarboxylic acid dianhydride. The fluorescence images were compared with SEM measurements as well as profilometer data. Fluorescence microscopy was successfully applied to detect sticking of the polymer, typical flow defects like filling deficiencies and uniformity of the imprint depth.Keywords
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