Vapor deposition polymerization of polyimide for microelectronic applications

• 1 May 1997
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 15  (3) , 844-849
• https://doi.org/10.1116/1.580718

Abstract

Keywords

• REFRACTIVE INDEX
• ATOMIC FORCE MICROSCOPY
• POLYMERIZATION
• DEPOSITION
• FILMS
• HIGH THROUGHPUT
• POLYMERS
• MATERIALS SCIENCE
• STOICHIOMETRY
• INFRARED SPECTRA
• DIELECTRIC MATERIALS
• MATRIX ASSISTED LASER DESORPTION IONIZATION
• CHEMICAL ANALYSIS
• INFRARED
• IR SPECTROSCOPY
• MICROELECTRONICS