A Novel Metal-Ferroelectric Insulator-Semiconductor (MFS) Capacitor Using PZT/SrTiO3 Layered Insulator
- 1 January 1993
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on siliconApplied Physics Letters, 1990