A temperature all-silicon micro-sensor based on the thermo-optic effect
- 1 May 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 44 (5) , 766-774
- https://doi.org/10.1109/16.568038
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- A temperature all-silicon micro-sensor based on the thermo-optic effectIEEE Transactions on Electron Devices, 1997
- High-accuracy distance measurements with multiple-wavelength interferometryOptical Engineering, 1995
- Laser-annealed thin-film fiber-optic temperature sensorPublished by SPIE-Intl Soc Optical Eng ,1994
- Thermo-optical modulation at 1.5μm in silicon etalonElectronics Letters, 1992
- Quadrature phase-shifted, extrinsic Fabry–Perot optical fiber sensorsOptics Letters, 1991
- Fiber-optic temperature sensing with ultrathin silicon étalonsOptics Letters, 1988
- Relation between the Height Distribution of a Rough Surface and the Reflectance at Normal IncidenceJournal of the Optical Society of America, 1963