The Eight Modes Observation in LiNbO3 Induced by 3.0 MeVHe+ Implantation
- 1 October 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (10B) , L1466-1467
- https://doi.org/10.1143/jjap.33.l1466
Abstract
The y-cut LiNbO3 was implanted by 3.0 MeV He+ to a dose of 2×1016 ions/cm2 at liquid nitrogen temperature. The eight black and bright modes from He implanted LiNbO3 waveguide were observed before and after rapid annealing. The refractive index profile is obtained by means of a non-stationary mode index calculation. The comparison of refractive index profile with damage profile is given. The result shows that the peak position of the refractive index profile is found to be in good agreement with the peak position of damage profile induced by 3.0 MeV He+ implanted in LiNbO3 based on transport of ions in matter (TRIM'92).Keywords
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