Resonant diaphragm pressure measurement system with ZnO on Si excitation

• 31 December 1983
• journal article
• Published by Elsevier in Sensors and Actuators
• Vol. 4, 565-571
• https://doi.org/10.1016/0250-6874(83)85068-9

Abstract

Keywords

• RESONANT DIAPHRAGM
• ZNO
• SI EXCITATION
• DIAPHRAGM PRESSURE MEASUREMENT