A simple optical emission method for measuring percent dissociations of feed gases in plasmas: Application to Cl2 in a high-density helical resonator plasma
- 1 May 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 14 (3) , 1076-1087
- https://doi.org/10.1116/1.580137
Abstract
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