Temperature measurements of glass substrates during plasma etching

• 1 March 1981
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 18  (2) , 335-338
• https://doi.org/10.1116/1.570753

Abstract

Keywords

• TEMPERATURE MEASUREMENTS
• PLASMA ETCHING
• GLASS SUBSTRATES
• SUBSTRATES DURING PLASMA