Radiolysis of resist polymers. 1. Poly(methyl α-haloacrylates) and copolymers with methyl methacrylate
- 1 December 1984
- journal article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 17 (12) , 2749-2755
- https://doi.org/10.1021/ma00142a054