Substrate Surface Preparation and Its Effect on Epitaxial Silicon

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (7) , 1183
• https://doi.org/10.1149/1.2408277

Abstract

Keywords

• EPITAXIAL SILICON
• SURFACE PREPARATION
• SUBSTRATE SURFACE
• EFFECT ON EPITAXIAL