Design and fabrication of ridge waveguide folded-cavity in-plane surface-emitting lasers

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Abstract
A 45 degrees angled reactive ion etching combined with an in situ monitoring technique was used to fabricate ridge waveguide folded-cavity in-plane surface-emitting lasers. This laser structure, with two 45 degrees C angle-etched internal total-reflection mirrors and an epitaxially grown distributed Bragg reflector, is very promising for OEIC applications. Laser-structure design and laser fabrication are addressed. A continuous-wave threshold current of 8 mA, the lowest reported in the literature, was achieved on 3- mu m-wide, 350- mu m long devices.