Microfabrication Inside Capillaries Using Multiphase Laminar Flow Patterning
- 2 July 1999
- journal article
- other
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 285 (5424) , 83-85
- https://doi.org/10.1126/science.285.5424.83
Abstract
The reaction of species in solutions flowing laminarly (without turbulent mixing) inside capillaries was used as the basis for a broadly applicable method of microfabrication. In this method, patterning occurs as a result of transport of reactive species to interfaces within the capillary by laminar flow. A wide range of chemistries can be used to generate structures with feature sizes of less than 5 micrometers and with spatial localization to within 5 micrometers. The method is applicable to the patterning of metals, organic polymers, inorganic crystals, and ceramics on the inner walls of preformed capillaries, using both additive and subtractive processes.Keywords
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