Molecular Beam Epitaxially Grown ZnSe(001) Surface Studied by the In Situ Observation of RHEED Intensity
- 1 August 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (8R) , 1647-1652
- https://doi.org/10.1143/jjap.30.1647
Abstract
The desorption of Zn and Se atoms or molecules on the (001) surface of a ZnSe/GaAs epitaxial layer were studied by means of reflection high-energy electron diffraction (RHEED). The temporal behavior of the specular intensity observed from two azimuths, [110] and [1̄10], was well understood by taking the surface condition into consideration; i.e., the surface terrace is elongated toward the [1̄10] direction and excessively adsorbed Se molecules exsist as well. We also confirmed that a higher-energy electron beam enhances the desorption of Se molecules and adatoms.Keywords
This publication has 9 references indexed in Scilit:
- Ultraviolet irradiation effect on the MBE growth of ZnSe/GaAs observed by RHEEDJournal of Crystal Growth, 1991
- Optical Properties of ZnSe Epilayers and FilmsPhysica Status Solidi (a), 1990
- Molecular beam epitaxy/atomic layer epitaxy growth processes of wide-band-gap II–VI compounds: Characterization of surface stoichiometry by reflection high-energy electron diffractionJournal of Vacuum Science & Technology A, 1990
- The application of scanning tunneling microscopy to the study of molecular beam epitaxyJournal of Crystal Growth, 1990
- Surface Processes in ALE and MBE Growth of ZnSe: Correlation of RHEED Intensity Variation with Surface CoverageJapanese Journal of Applied Physics, 1989
- I n s i t u scanning microprobe reflection high-energy electron diffraction observation of GaAs surfaces during molecular-beam epitaxial growthJournal of Vacuum Science & Technology B, 1989
- Reflection high-energy electron diffraction electron-stimulated desorption from ZnSe(100)(2×1)-Se surfacesJournal of Applied Physics, 1989
- Recent advances in the molecular beam epitaxy of the wide-bandgap semiconductor ZnSe and its superlatticesIEEE Journal of Quantum Electronics, 1988
- RHEED Observation on (001)ZnSe Surface: MBE Surface Phase Diagram and Kinetic Behavior of Zn And Se AdatomsJapanese Journal of Applied Physics, 1987