Measurement of Piezoelectric Displacements of Pb(Zr, Ti)O3 Thin Films Using a Double-Beam Interferometer
- 1 September 1999
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 38 (9S) , 5402-5405
- https://doi.org/10.1143/jjap.38.5402
Abstract
The double-beam interferometric method is applied to measure the field-induced displacement of Pb(Zr, Ti)O3 thin films. The dc electric field dependence of the longitudinal piezoelectric coefficient (d 33) response of Pb(Zr, Ti)O3 thin films deposited by metal organic chemical vapor deposition (MOCVD) was measured. Experimental d 33 values were compared with coefficients calculated using a phenomenological approach and bulk parameters. Qualitative agreement was obtained between measured and calculated coefficients.Keywords
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