Solidly mounted resonator based on aluminum nitride thin film
- 28 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 909-912
- https://doi.org/10.1109/ultsym.1998.762291
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Interferometric measurements of electric field-induced displacements in piezoelectric thin filmsReview of Scientific Instruments, 1996