Thermal Desorption and Infrared Studies of Sol‐Gel Derived SiO2 Coatings on Si Wafers
- 1 July 1991
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 138 (7) , 2150-2153
- https://doi.org/10.1149/1.2085941
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: