Negative-Working E-Beam Copolymers
- 18 April 1985
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 539, 138-144
- https://doi.org/10.1117/12.947826
Abstract
Copolymers of allyl methacrylate and propargyl methacrylate have very high speed as electron-beam and x-ray resists. They produce polymers of a structural complexity not often encountered in addition polymerization. The structural variety available in allyl methacrylate polymers gives them unusual properties, which consequently enhance their microlithographic performance.© (1985) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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