Reliability of high vacuum measurements
- 1 April 1983
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 1 (2) , 152-162
- https://doi.org/10.1116/1.572063
Abstract
In order to allow the users of vacuum measurements to assess the reliability of their measurements, the current state of high-vacuum standards and gauging is reviewed. The discussion includes several types of high-vacuum primary standards currently in use, an assessment of probable errors for several types of hot filament ion gauges, user-controlled factors that may serve to increase the errors, and the information available to date on the performance of a commercially available molecular drag gauge. Examples are given of the introduction of additional errors by the improper application of vacuum gauges.Keywords
This publication has 0 references indexed in Scilit: