Inhomogeneous thin film optical filters fabricatedusing glancing angle deposition
- 3 July 1997
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 33 (14) , 1213-1214
- https://doi.org/10.1049/el:19970834
Abstract
A novel method for fabricating inhomogeneous thin film optical interference filters is discussed. Glancing angle deposition (GLAD) and substrate motion are used to create a single material thin film with periodic index variation as a function of thickness. Filters fabricated with this technique promise to be much simpler and cheaper to produce and to have much lower stress than interference filters fabricated with other techniques.Keywords
This publication has 1 reference indexed in Scilit:
- OPTICS OF CRYSTALSPublished by Elsevier ,1980