Method for the local incorporation of Er into LiNbO3 guided wave optic devices by Ti co-diffusion

Abstract
Co‐diffusion of Er with Ti into LiNbO3 produces more than an order of magnitude enhancement in Er diffusivity over that achieved by ion implanting and thermal diffusion. The enhancement is dependent on the amount of Ti present. Er doped channel waveguide fabrication is completely compatible with standard Ti:LiNbO3 technology. Fluorescence measurements from co‐diffused and bulk grown Er doped LiNbO3 show that the co‐diffused Er3+ is in the LiNbO3 phase.