Electron cyclotron resonance plasma and thermal oxidation mechanisms of germanium

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 1309-1314
• https://doi.org/10.1116/1.579313

Abstract

Keywords

• OXIDATION MECHANISMS
• ELECTRON CYCLOTRON
• THERMAL OXIDATION
• GERMANIUM
• CYCLOTRON RESONANCE PLASMA