Deposition of boron nitride thin films by ion beam assisted deposition

• 1 January 1987
• journal article
• Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• Vol. 21  (1) , 586-587
• https://doi.org/10.1016/0168-583x(87)90912-8

Abstract

Keywords

• THIN FILM