Advances in matrix-lens technology
- 1 November 1975
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 12 (6) , 1161-1164
- https://doi.org/10.1116/1.568482
Abstract
Recent improvements in matrix-lens technology are reported in this paper. Previously, the lenslets have been of the three-aperture einzel construction. An extensive computer study of three-aperture einzel and two-aperture immersion lenses has been made at the General Electric Research and Development Center. Calculations, based on data from this study, demonstrate significant electron-optical advantages for two-aperture immersion lenslets as opposed to three-aperture einzel lenslets. Experimental data verifying the two-aperture immersion- lenslet operation are presented. Application of the two-aperture immersion matrix lens in a sealed tube environment is also presented and discussed.Keywords
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