Radio frequency plasma jet applied to coating of internal walls of narrow tubes

• 1 July 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 11  (4) , 1486-1490
• https://doi.org/10.1116/1.578689

Abstract

Keywords

• PLASMA JET
• RADIO FREQUENCY
• JET APPLIED
• NARROW TUBES
• INTERNAL WALLS
• FREQUENCY PLASMA