Electron beam effects on (CH2)17 self-assembled monolayer SiO2/Si specimens

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 2478-2485
• https://doi.org/10.1116/1.579197

Abstract

Keywords

• SELF ASSEMBLED MONOLAYER
• ELECTRON BEAM