Sensor systems for real-time feedback control of reactive ion etching

• 1 January 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (1) , 483-488
• https://doi.org/10.1116/1.588499

Abstract

Keywords

• SENSOR SYSTEMS
• TIME FEEDBACK
• REACTIVE ION ETCHING
• REAL TIME