Room-Temperature Imprint Lithography

• 1 May 2001
• journal article
• Published by Wiley in Advanced Materials
• Vol. 13  (10) , 749-752
• https://doi.org/10.1002/1521-4095(200105)13:10<749::aid-adma749>3.0.co;2-7

Abstract

Keywords

• LITHOGRAPHY
• NANOIMPRINTING
• NANOPATTERNING
• ROOM‐TEMPERATURE IMPRINTING
• POLYSTYRENE