On the preparation of cross-sectional TEM samples using lithographic processing and reactive ion-etching
- 2 May 1989
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 29 (1) , 110-114
- https://doi.org/10.1016/0304-3991(89)90236-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Lithographic fabrication of transmission electron microscopy cross sections in III–V materialsJournal of Vacuum Science & Technology B, 1986
- A new cross sectional thinning technique for transmission electron microscopyJournal of Vacuum Science & Technology B, 1985
- Reactive Ion EtchingPublished by Elsevier ,1984