Multilayers of amorphous carbon prepared by cathodic arc deposition
- 1 October 1997
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 94-95, 189-194
- https://doi.org/10.1016/s0257-8972(97)00346-0
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasingApplied Physics Letters, 1996
- Effect of vacuum arc deposition parameters on the properties of amorphous carbon thin filmsSurface and Coatings Technology, 1994
- DLC film deposition by Laser-Arc and study of propertiesThin Solid Films, 1994
- Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam sourceApplied Physics Letters, 1994
- Fabrication of amorphous diamond filmsThin Solid Films, 1993
- Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energyPhysical Review B, 1993
- Filtered arc deposition of amorphous diamondApplied Physics Letters, 1992
- Properties of tetrahedral amorphous carbon prepared by vacuum arc depositionDiamond and Related Materials, 1991
- Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamondJournal of Applied Physics, 1991
- Structure and hardness of diamond-like carbon films prepared by arc evaporationJournal of Materials Science Letters, 1988