Reactive Atom-Beam Etching of GaAs.

• 1 January 1987
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 30  (1) , 22-32
• https://doi.org/10.3131/jvsj.30.22

Abstract

Keywords

• GAAS
• REACTIVE ATOM BEAM
• ATOM BEAM ETCHING