Hydrogen depth profiling using SIMS—Problems and their solutions

• 1 May 1981
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 19  (1) , 47-52
• https://doi.org/10.1116/1.571015

Abstract

Keywords

• CONTAMINATION
• SIMS
• DEPTH
• HYDROGEN DETECTION
• IMPLANTED
• ARTIFACTS
• PROTON
• SECONDARY
• INSTRUMENTS
• PARTIAL