Analysis of Trapezoid Distortion due to Charge-Up in Electron Beam Recording

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Abstract
Rectangular patterns recorded by an electron beam upon a photographic plate are distorted into trapezoid shape because of the charge accumulated onto the recording plate. The distortion is theoretically analysed under various conditions with computer calculation. Computed values are compared with experimental values. They agree fairly well. The accelerating voltage is from 15 to 25 kV and the beam current is from 1 to 2 nA. The distortion depends upon accelerating voltage, charge density on a recorded line, scanning time for the line, length of the line, pitch of the recorded lines and a discharge time constant for the accumulated charge. The discharge time is closely related with the leak resistance and the stray capacitance of recording medium.

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