Three-dimensional imaging of a silicon flip chip using the two-photon optical-beam induced current effect
- 1 July 2002
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 81 (1) , 7-9
- https://doi.org/10.1063/1.1491301
Abstract
We describe two- and three-dimensional imaging of a flip-chipsiliconintegrated circuit using backside optical probing and femtosecondtwo-photon excitation at a laser wavelength of 1.275 μm. Using a ×50 microscope objective, we typically achieved micron resolutions or better in both lateral and axial directions. Using axial scanning and a peak-detection algorithm we have demonstrated optical depth profiling across components on the chip.Keywords
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