Analysis of the different contributions to the response of SAW gas sensors

Publisher Website

19 November 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/ultsym.1995.495630

Abstract

No abstract available

Keywords

This publication has 4 references indexed in Scilit:

Elastic properties of thin-film palladium for surface acoustic wave (SAW) sensors
Sensors and Actuators B: Chemical, 1995
Thin metal film characterization and chemical sensors: monitoring electronic conductivity, mass loading and mechanical properties with surface acoustic wave devices
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Vapor Detection with Surface Acoustic Wave Microsensors
Published by American Chemical Society (ACS) ,1989
Elastic Wave Propagation in Thin Layers
Published by Elsevier ,1972