Noncontact method for measuring coefficient of linear thermal expansion of thin films
- 1 September 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (5) , 3119-3122
- https://doi.org/10.1116/1.581468
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Temperature stability of thin-film narrow-bandpass filters produced by ion-assisted depositionApplied Optics, 1995
- Spectroscopic ellipsometry: A new tool for nondestructive depth profiling and characterization of interfacesJournal of Applied Physics, 1986