An Atomic Force Microscopy Study on the Roughness of Silicon Wafers Correlated with Direct Wafer Bonding
- 1 July 1996
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 143 (7) , 2365-2371
- https://doi.org/10.1149/1.1837009
Abstract
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