Advanced Etch Tool for High Etch Rate Deep Reactive Ion Etching in Silicon Micromachining Production Environment

This publication has 2 references indexed in Scilit:

• High-etch-rate deep anisotropic plasma etching of silicon for MEMS fabrication
  Published by SPIE-Intl Soc Optical Eng ,1998
• High-etch-rate anisotropic deep silicon plasma etching for the fabrication of microsensors
  Published by SPIE-Intl Soc Optical Eng ,1996