Acoustic-Wave Detection via a Piezoelectric Field-Effect Transducer
- 15 February 1972
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 20 (4) , 156-158
- https://doi.org/10.1063/1.1654089
Abstract
An oriented piezoelectric film has been incorporated in the insulator region of a silicon insulated‐gate field‐effect transistor to provide a sensitive high‐frequency strain transducer. With this device, strains as low as 10−8 have been detected and gauge factors of roughly 7000 have been attained for applied ac strains at 5.6 MHz.Keywords
This publication has 2 references indexed in Scilit:
- A metal-insulator-piezoelectric semiconductor electromechanical transducerIEEE Transactions on Electron Devices, 1965
- TRANSDUCER ACTION IN A METAL-INSULATOR-PIEZOELECTRIC-SEMICONDUCTOR TRIODEApplied Physics Letters, 1965