Computer-controlled four-gun multisubstrate sputtering system for the preparation of composition-modulated structures
- 1 April 1985
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 56 (4) , 607-612
- https://doi.org/10.1063/1.1138297
Abstract
We describe a four-gun sputtering system which has been used successfully to prepare composition-modulated structures consisting of amorphous semiconductors and superconducting alloys or binary compounds. The substrates are mounted in ovens which can be individually heated to over 1000 °C. The ovens are mounted on a wheel which is driven by a computer-controlled stepping motor. With appropriate programming of the movement of the stepping motor, the deposition sequence is determined.Keywords
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