Study of atomic transport mechanisms during thermal nitridation of silicon in ammonia using 15N and D labelled gas
- 1 September 1986
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 26 (3) , 326-334
- https://doi.org/10.1016/0169-4332(86)90073-5
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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